Keithley 6514 Electrometer: Precision Measurement for High-Resistance Applications

Keithley 6514 Programmable Electrometer — Ultra-Low Current and High-Impedance Precision Measurement.

The Keithley 6514 Programmable Electrometer is designed for ultra-low current and high-impedance measurements, delivering best-in-class sensitivity for precision laboratories, semiconductor research, and high-resistance testing environments. With <1fA noise, >200TΩ input impedance, and 1200 readings per second, this instrument ensures reliable results in demanding applications such as picoamp and sub-nanoamp testing, charge measurement, and insulation resistance evaluation.

The 6514 supports automation with IEEE-488 and RS-232 interfaces, allowing seamless integration into automated benches, semiconductor handling systems, and calibration labs. For applications requiring even higher resistance measurement capability, users often consider the Keithley 6517B , which offers extended performance for advanced materials research and insulation testing. Meanwhile, laboratories planning instrumentation infrastructure can also refer to our expert resource on how to build a cost-effective calibration lab in 2025 , ensuring the right foundation for precision and compliance workflows.

Key Features

• Ultra-Low Current Sensitivity: Detect currents down to the femtoampere range (<1fA noise level)

• High Impedance Voltage Measurements: >200TΩ input impedance

• Fast Sampling Rate: Up to 1200 readings per second

• Wide Charge Measurement Range: From 10fC to 20μC

• Easy cancellation of voltage and current offsets

• IEEE-488 and RS-232 connectivity for automated test systems

• Designed for precision labs and semiconductor test environments

Applications

• Semiconductor leakage current testing

• Insulation resistance and picoamp measurements

• Charge measurements in dielectric materials

• Electrometer-grade precision laboratory testing

• Sensor and photodiode evaluation

• Research laboratories and calibration facilities

What’s Included

• Keithley 6514 Electrometer (Model 6514)

• Model 237-ALG-2 triax cable

• Calibration certificate

• Instruction manual & documentation

Technical Highlights

For complete specifications, please refer to the official datasheet included with the product.